Description
This resulting volume details the state-of-the-art regarding numerous aspects of advanced micro technologies with respect to a wide range of materials, and the development of new production platforms for micro systems-based products. The contributions from leading authors from universities, independent research and corporate organizations provide an invaluable overview of this rapidly moving subject and an insight into key research and development areas. This comprehensive collection of indexed and peer-reviewed articles is also contained on a CD with search functionality.
